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Items: 1 to 20 of 48

1.
A Review of MEMS Vibrating Gyroscopes and Their Reliability Issues in Harsh Environments
Waqas Amin Gill, Ian Howard, Ilyas Mazhar, Kristoffer McKee
Sensors (Basel) 2022 Oct; 22(19): 7405. Published online 2022 Sep 29. doi: 10.3390/s22197405
PMCID:
PMC9571586
ArticlePDF–7.8M
2.
Development and Research of the Sensitive Element of the MEMS Gyroscope Manufactured Using SOI Technology
Danil Naumenko, Alexey Tkachenko, Igor Lysenko, Andrey Kovalev
Micromachines (Basel) 2023 Apr; 14(4): 895. Published online 2023 Apr 21. doi: 10.3390/mi14040895
PMCID:
PMC10145042
ArticlePDF–7.0M
3.
Spin Rate Effects in a Micromachined Electrostatically Suspended Gyroscope
Boqian Sun, Shunyue Wang, Yidong Tan, Yunfeng Liu, Fengtian Han
Sensors (Basel) 2018 Nov; 18(11): 3901. Published online 2018 Nov 12. doi: 10.3390/s18113901
PMCID:
PMC6263910
ArticlePDF–2.9M
4.
Gyroscope Technology and Applications: A Review in the Industrial Perspective
Vittorio M. N. Passaro, Antonello Cuccovillo, Lorenzo Vaiani, Martino De Carlo, Carlo Edoardo Campanella
Sensors (Basel) 2017 Oct; 17(10): 2284. Published online 2017 Oct 7. doi: 10.3390/s17102284
PMCID:
PMC5677445
ArticlePDF–3.6M
5.
The Development of Micromachined Gyroscope Structure and Circuitry Technology
Dunzhu Xia, Cheng Yu, Lun Kong
Sensors (Basel) 2014 Jan; 14(1): 1394–1473. Published online 2014 Jan 14. doi: 10.3390/s140101394
PMCID:
PMC3926620
ArticlePDF–5.7M
6.
Decoupling Control of Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension
Boqian Sun, Shunyue Wang, Haixia Li, Xiaoxia He
Sensors (Basel) 2016 Oct; 16(10): 1747. Published online 2016 Oct 20. doi: 10.3390/s16101747
PMCID:
PMC5087532
ArticlePDF–3.2M
7.
A Rotational Gyroscope with a Water-Film Bearing Based on Magnetic Self-Restoring Effect
Dianzhong Chen, Xiaowei Liu, Haifeng Zhang, Hai Li, Rui Weng, Ling Li, Wanting Rong, Zhongzhao Zhang
Sensors (Basel) 2018 Feb; 18(2): 415. Published online 2018 Jan 31. doi: 10.3390/s18020415
PMCID:
PMC5855013
ArticlePDF–4.4M
8.
The Recent Progress of MEMS/NEMS Resonators
Lei Wei, Xuebao Kuai, Yidi Bao, Jiangtao Wei, Liangliang Yang, Peishuai Song, Mingliang Zhang, Fuhua Yang, Xiaodong Wang
Micromachines (Basel) 2021 Jun; 12(6): 724. Published online 2021 Jun 19. doi: 10.3390/mi12060724
PMCID:
PMC8235191
ArticlePDF–3.8M
9.
Reliability of MEMS inertial devices in mechanical and thermal environments: A review
Yingyu Xu, Shuibin Liu, Chunhua He, Heng Wu, Lianglun Cheng, Guizhen Yan, Qinwen Huang
Heliyon. 2024 Mar 15; 10(5): e27481. Published online 2024 Mar 3. doi: 10.1016/j.heliyon.2024.e27481
PMCID:
PMC10937697
ArticlePDF–2.3M
10.
Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer
Feng Cui, Wu Liu, Wenyuan Chen, Weiping Zhang, Xiaosheng Wu
Sensors (Basel) 2011; 11(12): 11206–11234. Published online 2011 Nov 28. doi: 10.3390/s111211206
PMCID:
PMC3251979
ArticlePDF–1.6M
11.
Review on the Modeling of Electrostatic MEMS
Wan-Chun Chuang, Hsin-Li Lee, Pei-Zen Chang, Yuh-Chung Hu
Sensors (Basel) 2010; 10(6): 6149–6171. Published online 2010 Jun 21. doi: 10.3390/s100606149
PMCID:
PMC3247752
ArticlePDF–660K
12.
Reliability of MEMS in Shock Environments: 2000–2020
Tianfang Peng, Zheng You
Micromachines (Basel) 2021 Nov; 12(11): 1275. Published online 2021 Oct 20. doi: 10.3390/mi12111275
PMCID:
PMC8623205
ArticlePDF–5.7M
13.
Gravity at sea —A memoir of a marine geophysicist—
Yoshibumi TOMODA
Proc Jpn Acad Ser B Phys Biol Sci. 2010 Oct 8; 86(8): 769–787. doi: 10.2183/pjab.86.769
PMCID:
PMC3037522
ArticlePDF–1.2M
14.
A Study on Measurement Variations in Resonant Characteristics of Electrostatically Actuated MEMS Resonators
Faisal Iqbal, Byeungleul Lee
Micromachines (Basel) 2018 Apr; 9(4): 173. Published online 2018 Apr 9. doi: 10.3390/mi9040173
PMCID:
PMC6187468
ArticlePDF–16M
15.
Development Trends and Perspectives of Future Sensors and MEMS/NEMS
Jianxiong Zhu, Xinmiao Liu, Qiongfeng Shi, Tianyiyi He, Zhongda Sun, Xinge Guo, Weixin Liu, Othman Bin Sulaiman, Bowei Dong, Chengkuo Lee
Micromachines (Basel) 2020 Jan; 11(1): 7. Published online 2019 Dec 18. doi: 10.3390/mi11010007
PMCID:
PMC7019281
ArticlePDF–8.6M
16.
Review: Semiconductor Piezoresistance for Microsystems
A. Alvin Barlian, Woo-Tae Park, Joseph R. Mallon, Jr, Ali J. Rastegar, Beth L. Pruitt
Proc IEEE Inst Electr Electron Eng. Author manuscript; available in PMC 2010 Mar 1.
Published in final edited form as: Proc IEEE Inst Electr Electron Eng. 2009; 97(3): 513–552. doi: 10.1109/JPROC.2009.2013612
PMCID:
PMC2829857
ArticlePDF–9.0M
17.
FLUIDIC PERFORMANCE OF A DUAL-ACTION VITRECTOMY PROBE COMPARED WITH A SINGLE-ACTION PROBE
David H. Steel, Martin Charles, Ying Zhu, Sonalee Tambat, A. Mani Irannejad, Steve Charles
Retina. 2022 Nov; 42(11): 2150–2158. Published online 2022 Jul 21. doi: 10.1097/IAE.0000000000003573
PMCID:
PMC9584060
ArticlePDF–992K
18.
Micromachined Resonators: A Review
Reza Abdolvand, Behraad Bahreyni, Joshua E. -Y. Lee, Frederic Nabki
Micromachines (Basel) 2016 Sep; 7(9): 160. Published online 2016 Sep 8. doi: 10.3390/mi7090160
PMCID:
PMC6190074
ArticlePDF–14M
19.
CMOS MEMS Fabrication Technologies and Devices
Hongwei Qu
Micromachines (Basel) 2016 Jan; 7(1): 14. Published online 2016 Jan 21. doi: 10.3390/mi7010014
PMCID:
PMC6189935
ArticlePDF–4.6M
20.
High-Precision Inertial Sensor Charge Management Based on Ultraviolet Discharge: A Comprehensive Review
Tao Yu, Yuhua Wang, Yang Liu, Zhi Wang
Sensors (Basel) 2023 Sep; 23(18): 7794. Published online 2023 Sep 11. doi: 10.3390/s23187794
PMCID:
PMC10536178
ArticlePDF–2.1M

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